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Robust liquid metal collector mirror for EUV and soft X-ray plasma sources
Date Issued
2010-08-02
Date Available
2012-08-17T16:15:17Z
Abstract
Recent work in UCD has centred on the development of a liquid metal coating process for EUV and soft X-ray collector optics. The work involves using a room temperature liquid metal coated on a solid metal substrate of the appropriate form. The advances made demonstrate that a stable thin coating film on the interior surface of a rotating optic substrate is possible, and this offers promise as a solution to the problem of producing an atomically flat reflector that remains unspoiled in front of a multi-kilowatt EUV plasma. We report on the results of preliminary EUV tests carried out on a simple focusing liquid metal mirror.
Sponsorship
Science Foundation Ireland
Type of Material
Conference Publication
Publisher
SPIE
Copyright (Published Version)
2010 SPIE
Subject – LCSH
Liquid metals
Ultraviolet radiation
Grenz rays
Semiconductors
Extreme ultraviolet lithography
Language
English
Status of Item
Not peer reviewed
Part of
Goto, S., Khounary, A.M., Morawe, C. (eds.). Proceedings of SPIE : Volume 7802 : Advances in X-Ray/EUV Optics and Components V
Conference Details
Advances in X-Ray/EUV Optics
and Components V, 2–3 August 2010
San Diego, California, United States
This item is made available under a Creative Commons License
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