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Evaluation of the sensitivity of electro-acousic measurements for process monitoring and control of an atmospheric pressure plasma jet system
Date Issued
2011-05
Date Available
2014-01-24T11:55:37Z
Abstract
The development of non-invasive process diagnostic techniques for the control of
atmospheric plasmas is a critical issue for the wider adoption of this technology. This paper evaluates
the use of a frequency-domain deconvolution of an electro-acoustic emission as a means to monitor
and control the plasma formed using an atmospheric pressure plasma jet (APPJ) system. The air
plasma system investigated was formed using a PlasmaTreatâ„¢ OpenAir applicator. Change in the
electro-acoustic signal with changes in substrate type (ceramic, steel, polymer). APPJ nozzle to
substrate distance and substrate feature size were monitored. The decoding of the electro-acoustic
emission yields three sub dataset that are described three separate emission mechanisms. The three
emissions are associated with: the power supply fundamental drive frequency and its harmonics; the
APPJ nozzle longitudinal mode acoustic emission and its odd overtones, and the acoustic surface
reflection that is produced by the impedance mismatch between the discharge and the surface.
Incorporating this knowledge into a LabVIEW a program facilitated the continuous deconvolution of
the electro-acoustic data. This enabled the use of specific frequency band test limits to control the
process the APPJ treatment process which is sensitive to both plasma processing conditions and
substrate type and features.
PAC Codes: 52.40.Hf, 52.70.-m, 52.77.Fv, 43.60.Vx
Sponsorship
Science Foundation Ireland
Type of Material
Journal Article
Publisher
IOP Publishing
Journal
Plasma Sources Science & Technology
Volume
20
Issue
3
Start Page
035024
Copyright (Published Version)
2011 IOP Publishing
Language
English
Status of Item
Peer reviewed
This item is made available under a Creative Commons License
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Evaluation_of_the_sensitivity_of_electro-acoustic_measurements_for_process_monitoring_and_control_of_an_atmospheric_pressure_plasma_jet_system.pdf
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