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Atomic force microscopy-based experimental setup for studying domain switching dynamics in ferroelectric capacitors
Author(s)
Date Issued
2005-02
Date Available
2014-02-04T10:10:03Z
Abstract
This article describes an experimental setup for combined measurements of domain switching dynamics and switching currents in micrometer scale ferroelectric capacitors. The setup is based on a commercial atomic force microscope (AFM) that is equipped with a piezoresponse mode for domain imaging and with a wide bandwidth current amplifier for switching current recording. The setup allows combined domain/current measurements in capacitors as small as 1 mum(2) with switching times resolved down to 10 ns. The incorporation of switching current measurement capability into piezoresponse AFM makes detailed analysis of switching behavior in ferroelectric memory devices possible.
Other Sponsorship
National Science Foundation
U.S.-Israel Bilateral Science Foundation (BSF)
Fujitsu Limited
Type of Material
Journal Article
Publisher
American Institute of Physics
Journal
Review of Scientific Instruments
Volume
76
Issue
2
Start Page
023708
Copyright (Published Version)
2005 American Institute of Physics
Language
English
Status of Item
Peer reviewed
This item is made available under a Creative Commons License
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