Browsing by Author Higashiguchi, Takeshi

Showing results 1 to 8 of 8
Published DateTitleAuthor(s)
2012The effect of viewing angle on the spectral behavior of a Gd plasma source near 6.7 nmO'Gorman, ColmOtsuka, TakamitsuYugami, NoboruJiang, WeihuaEndo, AkiraLi, BowenCummins, T. (Thomas)Dunne, PadraigSokell, EmmaO'Sullivan, GerryHigashiguchi, Takeshi
2012Feasibility study of broad band efficient "water window" sourceHigashiguchi, TakeshiOtsuka, TakamitsuYugami, NoboruEndo, AkiraLi, BowenDunne, PadraigO'Sullivan, Gerry
5-Dec-2011Gd plasma source modeling at 6.7 nm for future lithographyLi, BowenDunne, PadraigHigashiguchi, TakeshiOtsuka, TakamitsuYugami, NoboruJiang, WeihuaEndo, AkiraO'Sullivan, Gerry
2012Optimizing conversion efficiency and reducing ion energy in a laser-produced Gd plasmaCummins, T. (Thomas)Otsuka, TakamitsuYugami, NoboruJiang, WeihuaEndo, AkiraLi, BowenO'Gorman, ColmDunne, PadraigSokell, EmmaO'Sullivan, GerryHigashiguchi, Takeshi
22-Aug-2011Scaling of laser produced plasma UTA emission down to 3 nm for next generation lithography and short wavelength imagingLi, BowenEndo, AkiraO'Gorman, ColmOtsuka, TakamitsuCummins, T. (Thomas)Donnelly, TonyKilbane, DeirdreDunne, PadraigO'Sullivan, GerryJiang, WeihuaHigashiguchi, TakeshiYugami, Noboru
7-Oct-2011Shorter-wavelength extreme-UV sources below 10nmHigashiguchi, TakeshiOtsuka, TakamitsuYugami, NoboruJiang, WeihuaEndo, AkiraDunne, PadraigLi, BowenO'Sullivan, Gerry
28-Feb-2011Spectral and temporal behavior of an alkali metal plasma extreme ultraviolet source for surface morphology applicationsHigashiguchi, TakeshiYamaguchi, MamiOtsuka, TakamitsuTerauchi, HiromitsuYugami, NoboruYatagai, ToyohikoD'Arcy, RebekahDunne, PadraigO'Sullivan, Gerry
Dec-2010Systematic investigation of self-absorption property and conversion efficiency of 6.7-nm extreme ultraviolet sourcesOtsuka, TakamitsuWhite, JohnKilbane, DeirdreHigashiguchi, TakeshiYugami, NoboruYatagai, ToyohikoJiang, WeihuaEndo, AkiraDunne, PadraigO'Sullivan, Gerry