Now showing 1 - 4 of 4
  • Publication
    Modelling of a charge control method for capacitive MEMS
    Charging of dielectric materials in microelectromechanical systems (MEMS) actuated electrostatically is a major reliability issue. In our previous work we proposed a feedback loop control method that is implemented as a circuit and that allows smart actuation for switches and varactors. In this paper we discuss system-level modeling of MEMS devices including all aspects of the system: proposed control method, charging dynamics and realistic models of the mechanical components of MEMS.
      454Scopus© Citations 5
  • Publication
    Dynamics of the MEMS pulsed digital oscillator with multiple delays in the feedback loop
    In this paper we apply methods of nonlinear dynamics to examine the behavior of the pulsed digital oscillator for microelectromechanical systems (MEMS). We study the regions of existence of oscillations and demonstrate the effect on these of including additional delays into the feedback loop.
      383Scopus© Citations 4
  • Publication
    On some properties of the output of a pulsed digital oscillator working with multiple resonances
    In this paper, we study the possible output of the pulsed digital oscillator (PDO) with multiple resonant modes of the mechanical resonator in the feedback loop. PDOs are simple circuits that allow linear resonators to maintain self-sustained oscillations and can work as mass-change resonant sensors. For a resonant sensor, activation of higher vibration modes of a mechanical resonator can be a way to improve its performance. We show that the location of the sensing/actuation system affects the output and can enhance higher mechanical modes.
      307Scopus© Citations 2
  • Publication
    Excitation of multiple spatial modes of a MEMS cantilever in the pulsed digital oscillator
    The aim of this paper is to apply an approach that will allow us to consider different mechanical modes of a MEMS cantilever in the form of separate mass-spring-damper equations with the appropriate form of an external driving. In the paper, we focus on a specific MEMS cantilever and use a Pulsed Digital Oscillator (PDO) to keep self-sustained oscillations of the mechanical structure. By applying the order-reduction procedure to a partial differential equation that describes the transversal deflections, we obtain a system of coupled ordinary differential equations that describes the excitation of multiple spatial modes. On the basis of these ordinary differential equations, we formulate a set of iterative maps to describe the evolution of the modes between two sampling events. The numerical simulations we present are focused on the most common case when the first two mechanical modes are taken into consideration
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