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Pons Nin, Joan
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Pons Nin, Joan
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Pons Nin, Joan
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Now showing 1 - 3 of 3
- PublicationPulsed Digital Oscillators for Electrostatic MEMS(IEEE, 2012-07-25)
; ; ; ; ; ; ; ; This paper introduces a new actuation scheme for implementing Pulsed Digital Oscillators (PDOs) for electrostatic MEMS resonators. In this scheme, the capacitance of the device is biased with a voltage and it is periodically sampled. Short pulses of zero voltage are applied depending on the decisions taken by the oscillator loop. The paper discusses in detail the implementation of such electrostatic PDO (e-PDO) through a prototype and links the e-PDO to the conventional PDO theory. As an example, it is shown that with this actuation scheme it is possible to excite different resonances of the mechanical structure simply by changing the parameters of the feedback filter of the oscillator.Scopus© Citations 11 561 - PublicationControl of MEMS vibration modes with Pulsed Digital Oscillators : Part I — theoryThe aim of this paper is to show that it is possible to excite selectively different mechanical resonant modes of a MEMS structure using Pulsed Digital Oscillators (PDOs). This can be done by simply changing the working parameters of the oscillator, namely its sampling frequency or its feedback filter. A set of iterative maps is formulated to describe the evolution of the spatial modes between two sampling events in PDOs. With this lumped model, it is established that under some circumstances PDO bitstreams related to only one of the resonances can be obtained, and that in the antioscillation regions of the PDO the mechanical energy is absorbed into the electrical domain on average. The possibility of selecting for a given resonant frequency the oscillation and antioscillation behaviour allows one to obtain oscillations at any given resonant mode of the MEMS structure.
Scopus© Citations 15 364 - PublicationControl of MEMS vibration modes with pulsed digital oscillators : part II — simulation and experimental results(IEEE, 2010-08)
; ; ; ; ; ; ; ; This paper extends our previous work on the selective excitation of mechanical vibration modes in MEMS devices using Pulsed Digital Oscillators. It begins by presenting extensive simulation results using the set of iterative maps that model the system and showing that it is possible to activate two or three spatial modes (resonances) of the mechanical structure with a Pulsed Digital Oscillator (PDO). The second part of this paper presents experimental results corroborating the theory and simulation results. It is shown that it is possible to separately excite vibration modes of the device by setting a few parameters of the PDO structure such as the sampling frequency and the sign of the feedback loop.Scopus© Citations 12 296