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  5. Control of MEMS vibration modes with pulsed digital oscillators : part II — simulation and experimental results
 
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Control of MEMS vibration modes with pulsed digital oscillators : part II — simulation and experimental results

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Author(s)
Ricart, Jordi 
Pons Nin, Joan 
Blokhina, Elena 
Gorreta, Sergi 
Hernando, Jorge 
Manzaneque, Tomas 
Sánchez-Rojas, José Luis‏ 
Feely, Orla 
Dominguez, Manuel 
Uri
http://hdl.handle.net/10197/3549
Date Issued
August 2010
Date Available
03T11:17:59Z April 2012
Abstract
This paper extends our previous work on the selective excitation of mechanical vibration modes in MEMS devices using Pulsed Digital Oscillators. It begins by presenting extensive simulation results using the set of iterative maps that model the system and showing that it is possible to activate two or three spatial modes (resonances) of the mechanical structure with a Pulsed Digital Oscillator (PDO). The second part of this paper presents experimental results corroborating the theory and simulation results. It is shown that it is possible to separately excite vibration modes of the device by setting a few parameters of the PDO structure such as the sampling frequency and the sign of the feedback loop.
Sponsorship
Science Foundation Ireland
Other funder
Other Sponsorship
Spanish government, TEC2007-67951/MIC (FEDER) project
Type of Material
Journal Article
Publisher
IEEE
Journal
IEEE Transactions on Circuits and Systems I
Volume
57
Issue
8
Start Page
1879
End Page
1890
Copyright (Published Version)
2010 IEEE
Keywords
  • Microelectromechanica...

  • Sigma-Delta modulatio...

  • Microresonators

  • Multimode control

Subject – LCSH
Microelectromechanical systems
Microresonators (Optoelectronics)
Oscillators, Electric
Modulation (Electronics)
DOI
10.1109/TCSI.2009.2038543
Web versions
http://dx.doi.org/10.1109/TCSI.2009.2038543
Language
English
Status of Item
Peer reviewed
ISSN
1549-8328
This item is made available under a Creative Commons License
https://creativecommons.org/licenses/by-nc-sa/1.0/
Owning collection
Electrical and Electronic Engineering Research Collection
Scopus© citations
11
Acquisition Date
Feb 5, 2023
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