Nanoscale characterization of β-phase HxLi1−xNbO3 layers by piezoresponse force microscopy

We investigate a non-destructive approach for the characterization of proton exchanged layers in LiNbO3 with sub-micrometric resolution by means of piezoresponse force microscopy (PFM). Through systematic analyses, we identify a clear correlation between optical measurements on the extraordinary refractive index and PFM measurements on the piezoelectric d 33 coefficient. Furthermore, we quantify the reduction of the latter induced by proton exchange as 83 ± 2% and 68 ± 3% of the LiNbO3 value, for undoped and 5 mol. % MgO-doped substrates, respectively.