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Interferometric resolution examined by means of electromagnetic theory
Author(s)
Date Issued
1995-04-01
Date Available
2011-11-22T15:21:40Z
Abstract
Interferometric methods are widely used in surface metrology. A question that arises is how much information about the surface can be extracted from a given interferogram. For examination of the resolution limit of
interferometry with coherent monochromatic light, interferograms of several surface relief gratings calculated with the use of approximate and rigorous theories are presented. The limits of the usefulness of scalar theory based on the use of the Fourier transform are indicated. Interferograms of dielectric and metallic structures are examined, including simple lamellar gratings and gratings made up of trapezoidal steps with varying slopes and depths. In all cases TE illumination is assumed. The effects of changing numerical aperture and defocus on the interferograms are also examined.
Sponsorship
Other funder
Other Sponsorship
European Commission
Type of Material
Journal Article
Publisher
Optical Society of America
Journal
Journal of the Optical Society of America A
Volume
12
Issue
4
Start Page
752
End Page
760
Copyright (Published Version)
1995 Optical Society of America
Subject – LCSH
Interferometry
Metrology
Web versions
Language
English
Status of Item
Not peer reviewed
ISSN
1084-7529 (print)
1520-8532 (online)
This item is made available under a Creative Commons License
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Interferometry resolution examined by means of electromagnetic theory.pdf
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934.61 KB
Format
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