Systematic investigation of self-absorption property and conversion efficiency of 6.7-nm extreme ultraviolet sources

We have demonstrated rare-earth plasma extreme ultraviolet sources at 6.7 nm to investigate the spectral behavior and the conversion efficiencies to different laser wavelength and the initial target densities. The conversion efficiency was maximized to be 0.9% at laser intensity of 7 × 1012 W/cm2 at its wavelength of 1064 nm, which is attributed to the minimum self-absorption effect by use of the low initial density target, together with the narrow spectrum. It is important to use a low initial density target and to produce low electron density plasmas for efficient EUV sources using the high-Z targets.