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Modelling of a charge control method for capacitive MEMS
Date Issued
2013-09
Date Available
2014-02-28T09:13:53Z
Abstract
Charging of dielectric materials in microelectromechanical
systems (MEMS) actuated electrostatically is a major
reliability issue. In our previous work we proposed a feedback
loop control method that is implemented as a circuit and that
allows smart actuation for switches and varactors. In this paper
we discuss system-level modeling of MEMS devices including
all aspects of the system: proposed control method, charging
dynamics and realistic models of the mechanical components of
MEMS.
systems (MEMS) actuated electrostatically is a major
reliability issue. In our previous work we proposed a feedback
loop control method that is implemented as a circuit and that
allows smart actuation for switches and varactors. In this paper
we discuss system-level modeling of MEMS devices including
all aspects of the system: proposed control method, charging
dynamics and realistic models of the mechanical components of
MEMS.
Sponsorship
Science Foundation Ireland
Type of Material
Conference Publication
Publisher
IEEE
Copyright (Published Version)
© 2014 IEEE
Language
English
Status of Item
Peer reviewed
Journal
2013 European Conference on Circuit Theory and Design (ECCTD) [proceedings]
Conference Details
European Conference on Circuit Theory and Design, 8-12 September 2013, Dresden, Germany
This item is made available under a Creative Commons License
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ECCTD2013_Modelling_of_charge_control.pdf
Size
1.73 MB
Format
Adobe PDF
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