A reflection grating with a binary surface profile is presented that has high diffraction efficiency. The measured intensity for the + 1st diffracted order was 77%. The binary grating is composed of a minilattice with feature sizes comparable with the wavelength of the incident light. The overall structure is designed in such a way that it imitates a conventional blazed grating. The grating also has interesting polarization properties. The main part of the TE-polarized light is diffracted into the 1st diffracted order, and most of the TM-polarized light remains in the 0th diffracted order. The measurements of the grating are compared with rigorous diffraction theory and found to be in reasonable agreement.
Deutsche Forschungsgemeinschaft (German Research Foundation)