Characterisation of titanium oxide layers using Raman spectroscopy and optical profilometry: Influence of oxide properties

Title: Characterisation of titanium oxide layers using Raman spectroscopy and optical profilometry: Influence of oxide properties
Authors: Ekoi, Emmanuel J.Gowen, AoifeDorrepaal, RonanDowling, Denis P.
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Date: Mar-2019
Online since: 2020-11-25T16:37:37Z
Abstract: This study evaluates the use of a combination of Raman spectroscopy and optical profilometry as a surface characterisation technique for the examination of oxide layers grown on titanium metal substrates. The titanium oxide layers with thickness of up to 8 µm, were obtained using a low-pressure oxygen microwave plasma treatment of the titanium metal substrate. The effect of the microwave plasma processing conditions (input power, pressure and treatment time) on the Raman bandwidth, intensity and peak position was evaluated. Also, the effect of these processing conditions on the surface roughness parameters (Sa, Sdq, Ssk and Sku) of the oxide layers was investigated. Analysis of the peak positions of Eg and A1g modes indicated that the effects of input power and chamber pressure was to induce a shift towards the lower frequency with increasing input power and pressure (1–2 kPa). The intensity of the Raman bands was found to be dependent on the morphology and surface chemistry of the oxide layer. The intensity of Raman band (A1g), was found to be particularly influenced by the average surface roughness (Sa) and the crystallite size. Exponential and polynomial relations were found to correlate with these properties. A two-latent variable Partial Least Squares Regression model developed on Raman spectral data could predict surface roughness with a coefficient of determination (R2) of approx. 0.87 when applied to the testing of an independent set of titanium oxide test coatings.
Funding Details: European Commission - Seventh Framework Programme (FP7)
Science Foundation Ireland
Type of material: Journal Article
Publisher: Elsevier
Journal: Results in Physics
Volume: 12
Start page: 1574
End page: 1585
Keywords: Titanium oxidationRaman spectroscopySurface roughness parametersRaman intensityMicrowave plasmaRaman mapping
DOI: 10.1016/j.rinp.2019.01.054
Language: en
Status of Item: Peer reviewed
This item is made available under a Creative Commons License:
Appears in Collections:Mechanical & Materials Engineering Research Collection
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