Investigation of AFM-based machining of ferroelectric thin films at the nanoscale

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Title: Investigation of AFM-based machining of ferroelectric thin films at the nanoscale
Authors: Zhang, FengyuanEdwards, DavidDeng, XiongKilpatrick, J. I.Rodriguez, Brian J.et al.
Permanent link: http://hdl.handle.net/10197/11992
Date: 17-Jan-2020
Online since: 2021-03-02T14:37:55Z
Abstract: Atomic force microscopy (AFM) has been utilized for nanomechanical machining of various materials including polymers, metals, and semiconductors. Despite being important candidate materials for a wide range of applications including data storage and actuators, ferroelectric materials have rarely been machined via AFM. AFM-based machining of ferroelectric nanostructures offers advantages over established techniques, such as bottom-up approaches and focused ion beam milling, in select cases where low damage and low-cost modification of already-fabricated thin films are required. Through a systematic investigation of a broad range of AFM parameters, we demonstrate that AFM-based machining provides a low-cost option to rapidly modify local regions of the film, as well as fabricate a range of different nanostructures, including a nanocapacitor array with individually addressable ferroelectric elements.
Funding Details: Science Foundation Ireland
Funding Details: China Scholarship Council
U.S. National Science Foundation (NSF)
Department of Education and Learning NI
National Natural Science Foundation of China
Type of material: Journal Article
Publisher: American Institute of Physics
Journal: Journal of Applied Physics
Volume: 127
Issue: 3
Copyright (published version): 2020 the Authors
Keywords: Piezoresponse force microscopyDomain structuresLithium niobateNanostructuresFabricationSiliconNanofabricationLithography
DOI: 10.1063/1.5133018
Language: en
Status of Item: Peer reviewed
ISSN: 0021-8979
This item is made available under a Creative Commons License: https://creativecommons.org/licenses/by-nc-nd/3.0/ie/
Appears in Collections:Conway Institute Research Collection
Physics Research Collection

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