Investigation of AFM-based machining of ferroelectric thin films at the nanoscale

Files in This Item:
File Description SizeFormat 
Zhang_JApplPhys_2020.pdf4.43 MBAdobe PDFDownload
Title: Investigation of AFM-based machining of ferroelectric thin films at the nanoscale
Authors: Zhang, FengyuanEdwards, DavidDeng, XiongKilpatrick, J. I.Rodriguez, Brian al.
Permanent link:
Date: 17-Jan-2020
Online since: 2021-03-02T14:37:55Z
Abstract: Atomic force microscopy (AFM) has been utilized for nanomechanical machining of various materials including polymers, metals, and semiconductors. Despite being important candidate materials for a wide range of applications including data storage and actuators, ferroelectric materials have rarely been machined via AFM. AFM-based machining of ferroelectric nanostructures offers advantages over established techniques, such as bottom-up approaches and focused ion beam milling, in select cases where low damage and low-cost modification of already-fabricated thin films are required. Through a systematic investigation of a broad range of AFM parameters, we demonstrate that AFM-based machining provides a low-cost option to rapidly modify local regions of the film, as well as fabricate a range of different nanostructures, including a nanocapacitor array with individually addressable ferroelectric elements.
Funding Details: Science Foundation Ireland
Funding Details: China Scholarship Council
U.S. National Science Foundation (NSF)
Department of Education and Learning NI
National Natural Science Foundation of China
Type of material: Journal Article
Publisher: American Institute of Physics
Journal: Journal of Applied Physics
Volume: 127
Issue: 3
Copyright (published version): 2020 the Authors
Keywords: Piezoresponse force microscopyDomain structuresLithium niobateNanostructuresFabricationSiliconNanofabricationLithography
DOI: 10.1063/1.5133018
Language: en
Status of Item: Peer reviewed
ISSN: 0021-8979
This item is made available under a Creative Commons License:
Appears in Collections:Conway Institute Research Collection
Physics Research Collection

Show full item record

Page view(s)

Last Week
Last month
checked on Apr 11, 2021


checked on Apr 11, 2021

Google ScholarTM



If you are a publisher or author and have copyright concerns for any item, please email and the item will be withdrawn immediately. The author or person responsible for depositing the article will be contacted within one business day.