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Investigation of AFM-based machining of ferroelectric thin films at the nanoscale
Date Issued
2020-01-17
Date Available
2021-03-02T14:37:55Z
Abstract
Atomic force microscopy (AFM) has been utilized for nanomechanical machining of various materials including polymers, metals, and semiconductors. Despite being important candidate materials for a wide range of applications including data storage and actuators, ferroelectric materials have rarely been machined via AFM. AFM-based machining of ferroelectric nanostructures offers advantages over established techniques, such as bottom-up approaches and focused ion beam milling, in select cases where low damage and low-cost modification of already-fabricated thin films are required. Through a systematic investigation of a broad range of AFM parameters, we demonstrate that AFM-based machining provides a low-cost option to rapidly modify local regions of the film, as well as fabricate a range of different nanostructures, including a nanocapacitor array with individually addressable ferroelectric elements.
Sponsorship
Science Foundation Ireland
Other Sponsorship
China Scholarship Council
U.S. National Science Foundation (NSF)
Department of Education and Learning NI
National Natural Science Foundation of China
Type of Material
Journal Article
Publisher
American Institute of Physics
Journal
Journal of Applied Physics
Volume
127
Issue
3
Copyright (Published Version)
2020 the Authors
Language
English
Status of Item
Peer reviewed
ISSN
0021-8979
This item is made available under a Creative Commons License
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