Coherent imaging of periodic thick fine isolated structures

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Title: Coherent imaging of periodic thick fine isolated structures
Authors: Sheridan, John T.
Sheppard, Colin
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Date: 1-Apr-1993
Abstract: The diffraction orders and coherent bright and dark field images produced by isolated steps and grooves (notches and trenches) are examined. The isolated structures are approximated by means of a grating with a large period that contains small, widely separated, lamellar structures. The rigorous modal method for TE polarized incident light is used for the numerical calculations. Structures in two types of dielectric material, refractive index n = 1.5 and n = 4.0, are discussed. The images are examined for variations with several parameters, including width and thickness of the structure and focus position. Several approximate methods for calculating these images, based on first-order approximations, are suggested.
Funding Details: Other funder
Type of material: Journal Article
Publisher: Optical Society of America
Copyright (published version): 1993 Optical Society of America
Subject LCSH: Dielectrics
DOI: 10.1364/JOSAA.10.000614
Language: en
Status of Item: Not peer reviewed
Appears in Collections:Electrical and Electronic Engineering Research Collection

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