Interferometric resolution examined by means of electromagnetic theory

Files in This Item:
File Description SizeFormat 
Interferometry resolution examined by means of electromagnetic theory.pdf934.61 kBAdobe PDFDownload
Title: Interferometric resolution examined by means of electromagnetic theory
Authors: Körner, T. O.
Sheridan, John T.
Schwider, J.
Permanent link: http://hdl.handle.net/10197/3324
Date: 1-Apr-1995
Abstract: Interferometric methods are widely used in surface metrology. A question that arises is how much information about the surface can be extracted from a given interferogram. For examination of the resolution limit of interferometry with coherent monochromatic light, interferograms of several surface relief gratings calculated with the use of approximate and rigorous theories are presented. The limits of the usefulness of scalar theory based on the use of the Fourier transform are indicated. Interferograms of dielectric and metallic structures are examined, including simple lamellar gratings and gratings made up of trapezoidal steps with varying slopes and depths. In all cases TE illumination is assumed. The effects of changing numerical aperture and defocus on the interferograms are also examined.
Funding Details: Other funder
Type of material: Journal Article
Publisher: Optical Society of America
Copyright (published version): 1995 Optical Society of America
Subject LCSH: Interferometry
Metrology
DOI: 10.1364/JOSAA.12.000752
Language: en
Status of Item: Not peer reviewed
Appears in Collections:Electrical and Electronic Engineering Research Collection

Show full item record

SCOPUSTM   
Citations 20

11
Last Week
0
Last month
checked on Aug 9, 2018

Page view(s) 20

164
checked on May 25, 2018

Download(s) 50

126
checked on May 25, 2018

Google ScholarTM

Check

Altmetric


This item is available under the Attribution-NonCommercial-NoDerivs 3.0 Ireland. No item may be reproduced for commercial purposes. For other possible restrictions on use please refer to the publisher's URL where this is made available, or to notes contained in the item itself. Other terms may apply.