Control of MEMS vibration modes with Pulsed Digital Oscillators : Part I — theory

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Title: Control of MEMS vibration modes with Pulsed Digital Oscillators : Part I — theory
Authors: Blokhina, Elena
Pons Nin, Joan
Ricart, Jordi
Feely, Orla
Dominguez, Manuel
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Date: Aug-2010
Abstract: The aim of this paper is to show that it is possible to excite selectively different mechanical resonant modes of a MEMS structure using Pulsed Digital Oscillators (PDOs). This can be done by simply changing the working parameters of the oscillator, namely its sampling frequency or its feedback filter. A set of iterative maps is formulated to describe the evolution of the spatial modes between two sampling events in PDOs. With this lumped model, it is established that under some circumstances PDO bitstreams related to only one of the resonances can be obtained, and that in the antioscillation regions of the PDO the mechanical energy is absorbed into the electrical domain on average. The possibility of selecting for a given resonant frequency the oscillation and antioscillation behaviour allows one to obtain oscillations at any given resonant mode of the MEMS structure.
Funding Details: Science Foundation Ireland
Type of material: Journal Article
Publisher: IEEE
Copyright (published version): 2010 IEEE
Keywords: Microelectromechanical systemsOscillatorsMicroresonatorsSigma-delta modulationMultimode controlEnergy efficiency
Subject LCSH: Microelectromechanical systems
Microresonators (Optoelectronics)
Oscillators, Electric
Modulation (Electronics)
DOI: 10.1109/TCSI.2009.2038541
Language: en
Status of Item: Peer reviewed
Appears in Collections:Electrical and Electronic Engineering Research Collection

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