Excitation of multiple spatial modes of a MEMS cantilever in the pulsed digital oscillator

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Title: Excitation of multiple spatial modes of a MEMS cantilever in the pulsed digital oscillator
Authors: Blokhina, Elena
Feely, Orla
Dominguez, Manuel
Permanent link: http://hdl.handle.net/10197/3497
Date: Aug-2009
Abstract: The aim of this paper is to apply an approach that will allow us to consider different mechanical modes of a MEMS cantilever in the form of separate mass-spring-damper equations with the appropriate form of an external driving. In the paper, we focus on a specific MEMS cantilever and use a Pulsed Digital Oscillator (PDO) to keep self-sustained oscillations of the mechanical structure. By applying the order-reduction procedure to a partial differential equation that describes the transversal deflections, we obtain a system of coupled ordinary differential equations that describes the excitation of multiple spatial modes. On the basis of these ordinary differential equations, we formulate a set of iterative maps to describe the evolution of the modes between two sampling events. The numerical simulations we present are focused on the most common case when the first two mechanical modes are taken into consideration
Funding Details: Science Foundation Ireland
Type of material: Conference Publication
Publisher: IEEE
Copyright (published version): 2009 IEEE
Keywords: MEMS;Oscillators
Subject LCSH: Microelectromechanical systems
Oscillators, Electric
Differential equations
DOI: 10.1109/ECCTD.2009.5275002
Language: en
Status of Item: Not peer reviewed
Is part of: European Conference on Circuit Theory and Design, 2009. ECCTD 2009. [proceedings]
Conference Details: Paper presented at the European Conference on Circuit Theory and Design 2009 (ECCTD 2009), Antalya, Turkey, 23-27 August 2009
Appears in Collections:Electrical and Electronic Engineering Research Collection

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