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Excitation of multiple spatial modes of a MEMS cantilever in the pulsed digital oscillator
Author(s)
Date Issued
2009-08
Date Available
2012-02-07T15:26:51Z
Abstract
The aim of this paper is to apply an approach that will allow us to consider different mechanical modes of a MEMS
cantilever in the form of separate mass-spring-damper equations with the appropriate form of an external driving. In the paper, we focus on a specific MEMS cantilever and use a Pulsed Digital Oscillator (PDO) to keep self-sustained oscillations of the mechanical structure. By applying the order-reduction procedure to a partial differential equation that describes the transversal deflections, we obtain a system of coupled ordinary differential equations that describes the excitation of multiple spatial modes. On the basis of these ordinary differential equations, we formulate a set of iterative maps to describe the evolution of the modes between
two sampling events. The numerical simulations we present are focused on the most common case when the first two mechanical modes are taken into consideration
Sponsorship
Science Foundation Ireland
Type of Material
Conference Publication
Publisher
IEEE
Copyright (Published Version)
2009 IEEE
Keywords
Subject – LCSH
Microelectromechanical systems
Oscillators, Electric
Differential equations
Web versions
Language
English
Status of Item
Not peer reviewed
Part of
European Conference on Circuit Theory and Design, 2009. ECCTD 2009. [proceedings]
Conference Details
Paper presented at the European Conference on Circuit Theory and Design 2009 (ECCTD 2009), Antalya, Turkey, 23-27 August 2009
ISBN
978-1-4244-3896-9
This item is made available under a Creative Commons License
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