Excitation of multiple spatial modes of a MEMS cantilever in the pulsed digital oscillator
|Title:||Excitation of multiple spatial modes of a MEMS cantilever in the pulsed digital oscillator||Authors:||Blokhina, Elena
|Permanent link:||http://hdl.handle.net/10197/3497||Date:||Aug-2009||Online since:||2012-02-07T15:26:51Z||Abstract:||The aim of this paper is to apply an approach that will allow us to consider different mechanical modes of a MEMS cantilever in the form of separate mass-spring-damper equations with the appropriate form of an external driving. In the paper, we focus on a specific MEMS cantilever and use a Pulsed Digital Oscillator (PDO) to keep self-sustained oscillations of the mechanical structure. By applying the order-reduction procedure to a partial differential equation that describes the transversal deflections, we obtain a system of coupled ordinary differential equations that describes the excitation of multiple spatial modes. On the basis of these ordinary differential equations, we formulate a set of iterative maps to describe the evolution of the modes between two sampling events. The numerical simulations we present are focused on the most common case when the first two mechanical modes are taken into consideration||Funding Details:||Science Foundation Ireland||Type of material:||Conference Publication||Publisher:||IEEE||Copyright (published version):||2009 IEEE||Keywords:||MEMS; Oscillators||Subject LCSH:||Microelectromechanical systems
|DOI:||10.1109/ECCTD.2009.5275002||Other versions:||http://dx.doi.org/10.1109/ECCTD.2009.5275002||Language:||en||Status of Item:||Not peer reviewed||Is part of:||European Conference on Circuit Theory and Design, 2009. ECCTD 2009. [proceedings]||Conference Details:||Paper presented at the European Conference on Circuit Theory and Design 2009 (ECCTD 2009), Antalya, Turkey, 23-27 August 2009||ISBN:||978-1-4244-3896-9|
|Appears in Collections:||Electrical and Electronic Engineering Research Collection|
Show full item record
Page view(s) 20115
This item is available under the Attribution-NonCommercial-NoDerivs 3.0 Ireland. No item may be reproduced for commercial purposes. For other possible restrictions on use please refer to the publisher's URL where this is made available, or to notes contained in the item itself. Other terms may apply.