Control of MEMS vibration modes with pulsed digital oscillators : part II — simulation and experimental results

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Title: Control of MEMS vibration modes with pulsed digital oscillators : part II — simulation and experimental results
Authors: Ricart, Jordi
Pons Nin, Joan
Blokhina, Elena
Gorreta, Sergi
Hernando, Jorge
Manzaneque, Tomas
Sánchez-Rojas, José Luis‏
Feely, Orla
Dominguez, Manuel
Permanent link: http://hdl.handle.net/10197/3549
Date: Aug-2010
Abstract: This paper extends our previous work on the selective excitation of mechanical vibration modes in MEMS devices using Pulsed Digital Oscillators. It begins by presenting extensive simulation results using the set of iterative maps that model the system and showing that it is possible to activate two or three spatial modes (resonances) of the mechanical structure with a Pulsed Digital Oscillator (PDO). The second part of this paper presents experimental results corroborating the theory and simulation results. It is shown that it is possible to separately excite vibration modes of the device by setting a few parameters of the PDO structure such as the sampling frequency and the sign of the feedback loop.
Funding Details: Science Foundation Ireland
Other funder
Type of material: Journal Article
Publisher: IEEE
Copyright (published version): 2010 IEEE
Keywords: Microelectromechanical systems (MEMS);Sigma-Delta modulation;Microresonators;Multimode control
Subject LCSH: Microelectromechanical systems
Microresonators (Optoelectronics)
Oscillators, Electric
Modulation (Electronics)
DOI: 10.1109/TCSI.2009.2038543
Language: en
Status of Item: Peer reviewed
Appears in Collections:Electrical and Electronic Engineering Research Collection

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