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Control of MEMS vibration modes with pulsed digital oscillators : part II — simulation and experimental results
Date Issued
2010-08
Date Available
2012-04-03T11:17:59Z
Abstract
This paper extends our previous work on the
selective excitation of mechanical vibration modes in MEMS devices using Pulsed Digital Oscillators. It begins by presenting extensive simulation results using the set of iterative maps that model the system and showing that it is possible to activate two
or three spatial modes (resonances) of the mechanical structure with a Pulsed Digital Oscillator (PDO). The second part of this
paper presents experimental results corroborating the theory and simulation results. It is shown that it is possible to separately excite vibration modes of the device by setting a few parameters of the PDO structure such as the sampling frequency and the sign of the feedback loop.
Sponsorship
Science Foundation Ireland
Other funder
Other Sponsorship
Spanish government, TEC2007-67951/MIC (FEDER) project
Type of Material
Journal Article
Publisher
IEEE
Journal
IEEE Transactions on Circuits and Systems I
Volume
57
Issue
8
Start Page
1879
End Page
1890
Copyright (Published Version)
2010 IEEE
Subject – LCSH
Microelectromechanical systems
Microresonators (Optoelectronics)
Oscillators, Electric
Modulation (Electronics)
Web versions
Language
English
Status of Item
Peer reviewed
ISSN
1549-8328
This item is made available under a Creative Commons License
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