Dielectronic recombination of Pd-like gadolinium

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Title: Dielectronic recombination of Pd-like gadolinium
Authors: Li, Bowen
O'Sullivan, Gerry
Fu, Y.B.
Dong, C.Z.
Permanent link: http://hdl.handle.net/10197/3569
Date: Jan-2012
Abstract: As research and development of extreme ultraviolet lithography (EUVL) sources at 6.7 nm (which will be based on emission from ionized gadolinium) has already begun, reliable atomic data are required in order to determine the optimum plasma conditions. However, the complexity of the atomic structure means that ab initio level-resolved dielectronic recombination (DR) calculations are currently unavailable for the ions of interest. Here we report the first detailed calculation of the DR rate coefficients for the ground state and first excited states of Pd-like gadolinium. Energy levels, radiative transition probabilities, and autoionization rates of Ag-like gadolinium for [Kr]4d94fnl, [Kr]4p54d104fnl, [Kr]4d95l'nl, and [Kr]4d96l'nl (n ≤ 18) complexes were calculated using the flexible atomic code (FAC). It was found that inclusion of 4p54d104fnl configurations has significant influence on the total DR rate coefficient. The DR rate coefficients obtained here are compared with radiative recombination and three-body recombination coeffcients. The results show that the DR rate coefficient is almost an order of magnitude higher than the coefficients for the other two recombination processes combined at plasma electron temperatures around 110 eV, which suggests that the DR process should be included in theoretical modeling for Pd-like gadolinium in EUVL source plasmas.
Funding Details: Science Foundation Ireland
Other funder
Type of material: Journal Article
Publisher: American Physical Society
Copyright (published version): 2012 American Physical Society
Keywords: Electron-ion recombination;Electron attachment
Subject LCSH: Ion recombination
Scattering (Physics)
Gadolinium
DOI: 10.1103/PhysRevA.85.012712
Language: en
Status of Item: Peer reviewed
Appears in Collections:Physics Research Collection

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This item is available under the Attribution-NonCommercial-NoDerivs 3.0 Ireland. No item may be reproduced for commercial purposes. For other possible restrictions on use please refer to the publisher's URL where this is made available, or to notes contained in the item itself. Other terms may apply.