Spectral and temporal behavior of an alkali metal plasma extreme ultraviolet source for surface morphology applications

Title: Spectral and temporal behavior of an alkali metal plasma extreme ultraviolet source for surface morphology applications
Authors: Higashiguchi, Takeshi
Yamaguchi, Mami
Otsuka, Takamitsu
Terauchi, Hiromitsu
Yugami, Noboru
Yatagai, Toyohiko
D'Arcy, Rebekah
Dunne, Padraig
O'Sullivan, Gerry
Permanent link: http://hdl.handle.net/10197/3586
Date: 28-Feb-2011
Abstract: We have characterized the emission spectrum and temporal history of a pure potassium plasma in a capillary discharge. Strong broadband emission was observed around 40 nm due to 3s−3p, 3p−3d, and 3d−4f transitions in ions ranging from K2+ to K4+ at a time-integrated electron temperature of about 12 eV. The temporal behavior of this emission strongly follows the recombination phase in the plasma and it was successfully reproduced by a hydrodynamic simulation of the potassium plasma which accounted for atomic processes.
Funding Details: Science Foundation Ireland
Type of material: Journal Article
Publisher: American Institute of Physics
Copyright (published version): 2011 American Institute of Physics
Keywords: Plasma;EUV
Subject LCSH: Plasma (Ionized gases)
Plasma dynamics
Ultraviolet radiation
DOI: 10.1063/1.3560304
Language: en
Status of Item: Peer reviewed
Appears in Collections:Physics Research Collection

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