Systematic investigation of self-absorption property and conversion efficiency of 6.7-nm extreme ultraviolet sources

Title: Systematic investigation of self-absorption property and conversion efficiency of 6.7-nm extreme ultraviolet sources
Authors: Otsuka, Takamitsu
White, John
Kilbane, Deirdre
Higashiguchi, Takeshi
Yugami, Noboru
Yatagai, Toyohiko
Jiang, Weihua
Endo, Akira
Dunne, Padraig
O'Sullivan, Gerry
Permanent link: http://hdl.handle.net/10197/3599
Date: Dec-2010
Abstract: We have demonstrated rare-earth plasma extreme ultraviolet sources at 6.7 nm to investigate the spectral behavior and the conversion efficiencies to different laser wavelength and the initial target densities. The conversion efficiency was maximized to be 0.9% at laser intensity of 7 × 1012 W/cm2 at its wavelength of 1064 nm, which is attributed to the minimum self-absorption effect by use of the low initial density target, together with the narrow spectrum. It is important to use a low initial density target and to produce low electron density plasmas for efficient EUV sources using the high-Z targets.
Funding Details: Science Foundation Ireland
Other funder
Type of material: Journal Article
Publisher: American Institute of Physics
Copyright (published version): 2010 American Institute of Physics
Keywords: PlasmaEUV
Subject LCSH: Ultraviolet radiation
Laser plasmas
DOI: 10.1063/1.3526383
Language: en
Status of Item: Peer reviewed
Appears in Collections:Physics Research Collection

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