Dielectric charge control in electrostatic MEMS positioners / varactors
|Title:||Dielectric charge control in electrostatic MEMS positioners / varactors||Authors:||Blokhina, Elena
Pons Nin, Joan
|Permanent link:||http://hdl.handle.net/10197/3615||Date:||6-Feb-2012||Online since:||2012-05-15T16:15:03Z||Abstract:||A new dynamical closed-loop method is proposed to control dielectric charging in capacitive MEMS positioners/ varactors for enhanced reliability and robustness. Instead of adjusting the magnitude of the control voltage to compensate the drift caused by the dielectric charge, the method uses a feedback loop to maintain it at a desired level: the device capacitance is periodically sampled and bipolar pulses of constant magnitude are applied. Specific models describing the dynamics of charge and a control map are introduced. Validation of the proposed method is accomplished both through discrete-time simulations and with experiments using MEMS devices that suffer from dielectric charging.||Funding Details:||Science Foundation Ireland||Type of material:||Journal Article||Publisher:||IEEE||Journal:||Journal of Microelectromechanical Systems||Volume:||21||Issue:||3||Start page:||559||End page:||573||Copyright (published version):||2012 IEEE||Keywords:||MEMS control; Dielectric charging control; MEMS reliability||Subject LCSH:||Microelectromechanical systems (MEMS)
|DOI:||10.1109/JMEMS.2011.2182500||Language:||en||Status of Item:||Peer reviewed|
|Appears in Collections:||Electrical and Electronic Engineering Research Collection|
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