Dielectric charge control in electrostatic MEMS positioners / varactors

Files in This Item:
File Description SizeFormat 
JMEMS2012_switches.pdf673.77 kBAdobe PDFDownload
Title: Dielectric charge control in electrostatic MEMS positioners / varactors
Authors: Blokhina, Elena
Lopez, David
Gorreta, Sergi
Molinero, David
Feely, Orla
Pons Nin, Joan
Dominguez, Manuel
Permanent link: http://hdl.handle.net/10197/3615
Date: 6-Feb-2012
Abstract: A new dynamical closed-loop method is proposed to control dielectric charging in capacitive MEMS positioners/ varactors for enhanced reliability and robustness. Instead of adjusting the magnitude of the control voltage to compensate the drift caused by the dielectric charge, the method uses a feedback loop to maintain it at a desired level: the device capacitance is periodically sampled and bipolar pulses of constant magnitude are applied. Specific models describing the dynamics of charge and a control map are introduced. Validation of the proposed method is accomplished both through discrete-time simulations and with experiments using MEMS devices that suffer from dielectric charging.
Funding Details: Science Foundation Ireland
Type of material: Journal Article
Publisher: IEEE
Copyright (published version): 2012 IEEE
Keywords: MEMS control;Dielectric charging control;MEMS reliability
Subject LCSH: Microelectromechanical systems (MEMS)
Dielectrics
DOI: 10.1109/JMEMS.2011.2182500
Language: en
Status of Item: Peer reviewed
Appears in Collections:Electrical and Electronic Engineering Research Collection

Show full item record

SCOPUSTM   
Citations 20

20
Last Week
0
Last month
checked on Jun 22, 2018

Google ScholarTM

Check

Altmetric


This item is available under the Attribution-NonCommercial-NoDerivs 3.0 Ireland. No item may be reproduced for commercial purposes. For other possible restrictions on use please refer to the publisher's URL where this is made available, or to notes contained in the item itself. Other terms may apply.