Dielectric charge control in electrostatic MEMS positioners / varactors

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Title: Dielectric charge control in electrostatic MEMS positioners / varactors
Authors: Blokhina, Elena
Lopez, David
Gorreta, Sergi
Molinero, David
Feely, Orla
Pons Nin, Joan
Dominguez, Manuel
Permanent link: http://hdl.handle.net/10197/3615
Date: 6-Feb-2012
Online since: 2012-05-15T16:15:03Z
Abstract: A new dynamical closed-loop method is proposed to control dielectric charging in capacitive MEMS positioners/ varactors for enhanced reliability and robustness. Instead of adjusting the magnitude of the control voltage to compensate the drift caused by the dielectric charge, the method uses a feedback loop to maintain it at a desired level: the device capacitance is periodically sampled and bipolar pulses of constant magnitude are applied. Specific models describing the dynamics of charge and a control map are introduced. Validation of the proposed method is accomplished both through discrete-time simulations and with experiments using MEMS devices that suffer from dielectric charging.
Funding Details: Science Foundation Ireland
Type of material: Journal Article
Publisher: IEEE
Journal: Journal of Microelectromechanical Systems
Volume: 21
Issue: 3
Start page: 559
End page: 573
Copyright (published version): 2012 IEEE
Keywords: MEMS controlDielectric charging controlMEMS reliability
Subject LCSH: Microelectromechanical systems (MEMS)
DOI: 10.1109/JMEMS.2011.2182500
Language: en
Status of Item: Peer reviewed
Appears in Collections:Electrical and Electronic Engineering Research Collection

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