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Pulsed Digital Oscillators for Electrostatic MEMS
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| File | Description | Size | Format | |
|---|---|---|---|---|
| TCAS1_2012_ePDO_MEMS.pdf | 1.89 MB | Adobe PDF | Download |
| Title: | Pulsed Digital Oscillators for Electrostatic MEMS | Authors: | Fernandez, D. Jimenez, V. Madrenas, J. Gorreta, Sergi Blokhina, Elena Pons Nin, Joan O'Connell, Diarmuid Feely, Orla Dominguez, Manuel |
Permanent link: | http://hdl.handle.net/10197/3875 | Date: | 25-Jul-2012 | Abstract: | This paper introduces a new actuation scheme for implementing Pulsed Digital Oscillators (PDOs) for electrostatic MEMS resonators. In this scheme, the capacitance of the device is biased with a voltage and it is periodically sampled. Short pulses of zero voltage are applied depending on the decisions taken by the oscillator loop. The paper discusses in detail the implementation of such electrostatic PDO (e-PDO) through a prototype and links the e-PDO to the conventional PDO theory. As an example, it is shown that with this actuation scheme it is possible to excite different resonances of the mechanical structure simply by changing the parameters of the feedback filter of the oscillator. | Funding Details: | Science Foundation Ireland | Type of material: | Journal Article | Publisher: | IEEE | Copyright (published version): | 2012, IEEE | Keywords: | Microelectromechanical systems (MEMS);Oscillators;Electrostatic actuation | Subject LCSH: | Microelectromechanical systems Oscillators, Electric Electrostatics |
DOI: | 10.1109/TCSI.2012.2206459 | Language: | en | Status of Item: | Peer reviewed |
| Appears in Collections: | Electrical and Electronic Engineering Research Collection |
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