Pulsed Digital Oscillators for Electrostatic MEMS

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Title: Pulsed Digital Oscillators for Electrostatic MEMS
Authors: Fernandez, D.
Jimenez, V.
Madrenas, J.
Gorreta, Sergi
Blokhina, Elena
Pons Nin, Joan
O'Connell, Diarmuid
Feely, Orla
Dominguez, Manuel
Permanent link: http://hdl.handle.net/10197/3875
Date: 25-Jul-2012
Abstract: This paper introduces a new actuation scheme for implementing Pulsed Digital Oscillators (PDOs) for electrostatic MEMS resonators. In this scheme, the capacitance of the device is biased with a voltage and it is periodically sampled. Short pulses of zero voltage are applied depending on the decisions taken by the oscillator loop. The paper discusses in detail the implementation of such electrostatic PDO (e-PDO) through a prototype and links the e-PDO to the conventional PDO theory. As an example, it is shown that with this actuation scheme it is possible to excite different resonances of the mechanical structure simply by changing the parameters of the feedback filter of the oscillator.
Funding Details: Science Foundation Ireland
Type of material: Journal Article
Publisher: IEEE
Copyright (published version): 2012, IEEE
Keywords: Microelectromechanical systems (MEMS);Oscillators;Electrostatic actuation
Subject LCSH: Microelectromechanical systems
Oscillators, Electric
Electrostatics
DOI: 10.1109/TCSI.2012.2206459
Language: en
Status of Item: Peer reviewed
Appears in Collections:Electrical and Electronic Engineering Research Collection

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