Replication of micro/nano-scale features by micro injection molding with a bulk metallic glass mold insert
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|Title:||Replication of micro/nano-scale features by micro injection molding with a bulk metallic glass mold insert||Authors:||Zhang, Nan
Chu, J. S.
Byrne, Cormac J.
|Permanent link:||http://hdl.handle.net/10197/4674||Date:||17-May-2012||Abstract:||The development of MEMS and Microsystems needs a reliable mass production process to fabricate micro components with micro/nano scale features. In our study, we used the micro injection molding process to replicate micro/nano scale channels and ridges from a Bulk Metallic Glass (BMG) cavity insert. High density polyethylene (HDPE) was used as the molding material and Design of Experiment (DOE) was adopted to systematically and statistically investigate the relationship between machine parameters, real process conditions and replication quality. The peak cavity pressure and temperature were selected as process characteristic values to describe the real process conditions that material experienced during the filling process. The experiments revealed that the replication of ridges, including feature edge, profile and filling height, was sensitive to the flow direction; cavity pressure and temperature both increased with holding pressure and mold temperature; replication quality can be improved by increasing cavity pressure and temperature within a certain range. The replication quality of micro/nano features is tightly related to the thermomechanical history of material experienced during the molding process. In addition, the longevity and roughness of the BMG insert was also evaluated based on the number of injection molding cycles.||Type of material:||Journal Article||Publisher:||IOP Publishing||Copyright (published version):||2012 IOP Publishing||Keywords:||Microsystems||DOI:||10.1088/0960-1317/22/6/065019||Language:||en||Status of Item:||Peer reviewed|
|Appears in Collections:||Mechanical & Materials Engineering Research Collection|
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