Effect of design on the replication of micro/nano scale features by micro injection moulding

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Title: Effect of design on the replication of micro/nano scale features by micro injection moulding
Authors: Zhang, Nan
Browne, David J.
Gilchrist, M. D.
Permanent link: http://hdl.handle.net/10197/4707
Date: 2011
Abstract: The replication of micro/nano scale features is of great interest for MEMS and Microsystems. However, the flow behaviour of melts into a micro/nano cavity is still not well understood. In this work, we used the micro injection moulding process to replicate micro/nano scale channels and ridges from a Bulk Metallic Glass (BMG) cavity insert. High density polyethylene (HDPE) was used as the moulding material. The influence of feature configuration, length, width, gap distance between features, location on substrate, and substrate thickness on the quality of replication was investigated. The experiments revealed that the replication of ridges, including feature edge, profile and filling distance, was sensitive to the flow direction; a critical feature length was found below which the filling of features was significantly reduced. Both the feature location and the substrate thickness had an influence on the filling of micro/nano features while the gap distance had a negligible effect on the replication of features.
Type of material: Conference Publication
Publisher: Research Publishing Services
Copyright (published version): 2011 the authors
Keywords: Micro Injection MoldingReplication qualityMicro/nano featuresBulk metallic glass
Language: en
Status of Item: Not peer reviewed
Conference Details: 4M 2011 Conference, Stuttgart, Germany, 8-10 November 2011
Appears in Collections:Mechanical & Materials Engineering Research Collection

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