Individual switching of film-based nanoscale epitaxial ferroelectric capacitors

Files in This Item:
File Description SizeFormat 
Kim_et_al_J_Appl_Phys_2010.pdf816.92 kBAdobe PDFDownload
Title: Individual switching of film-based nanoscale epitaxial ferroelectric capacitors
Authors: Kim, Yunseok
Han, Hee
Rodriguez, Brian J.
et al.
Permanent link: http://hdl.handle.net/10197/5083
Date: Aug-2010
Abstract: We have investigated the individual switching of nanoscale capacitors by piezoresponse force microscopy. Nanoscale epitaxial ferroelectric capacitors with terabyte per inch square equivalent density were fabricated by the deposition of top electrodes onto a pulsed laser deposited lead zirconate titanate thin film by electron beam evaporation through ultrathin anodic aluminum oxide membrane stencil masks. Using bias pulses, the nanoscale capacitors were uniformly switched and proved to be individually addressable. These film-based nanoscale capacitors might be a feasible alternative for high-density mass storage memory applications with near terabyte per inch square density due to the absence of any cross-talk effects. (C) 2010 American Institute of Physics. [doi:10.1063/1.3474960]
Type of material: Journal Article
Publisher: AIP Publishing
Copyright (published version): 2010 American Institute of Physics
Keywords: Capacitors;Ferroelectric thin films;Nanofabrication
DOI: 10.1063/1.3474960
Language: en
Status of Item: Peer reviewed
Appears in Collections:Physics Research Collection

Show full item record

SCOPUSTM   
Citations 20

14
Last Week
0
Last month
checked on Jun 15, 2018

Page view(s) 50

55
checked on May 25, 2018

Download(s) 50

98
checked on May 25, 2018

Google ScholarTM

Check

Altmetric


This item is available under the Attribution-NonCommercial-NoDerivs 3.0 Ireland. No item may be reproduced for commercial purposes. For other possible restrictions on use please refer to the publisher's URL where this is made available, or to notes contained in the item itself. Other terms may apply.