Fabrication, dynamics, and electrical properties of insulated scanning probe microscopy probes for electrical and electromechanical imaging in liquids

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Title: Fabrication, dynamics, and electrical properties of insulated scanning probe microscopy probes for electrical and electromechanical imaging in liquids
Authors: Rodriguez, Brian J.
Jesse, S.
Seal, K.
et al.
Permanent link: http://hdl.handle.net/10197/5211
Date: 30-Aug-2007
Abstract: Insulated cantilever probes with a high aspect ratio conducting apex have been fabricated and their dynamic and electrical properties analyzed. The cantilevers were coated with silicon dioxide and a via was fabricated through the oxide at the tip apex and backfilled with tungsten to create an insulated probe with a conducting tip. The stiffness and Q factor of the cantilevers increased after the modifications and their resonances shifted to higher frequencies. The coupling strength between the cantilever and the coating are determined. Electromechanical imaging of ferroelectric domains, current voltage probing of a gold surface, and a probe apex repair process are demonstrated.
Type of material: Journal Article
Publisher: American Institute of Physics
Copyright (published version): 2007, American Institute of Physics
Keywords: Electromechanical imaging;Liquids
DOI: 10.1063/1.2778762
Language: en
Status of Item: Peer reviewed
Appears in Collections:Physics Research Collection

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