Evaluation of the sensitivity of electro-acousic measurements for process monitoring and control of an atmospheric pressure plasma jet system

Title: Evaluation of the sensitivity of electro-acousic measurements for process monitoring and control of an atmospheric pressure plasma jet system
Authors: Law, Victor J.
O'Neill, Feidhlim T.
Dowling, Denis P.
Permanent link: http://hdl.handle.net/10197/5261
Date: May-2011
Abstract: The development of non-invasive process diagnostic techniques for the control of atmospheric plasmas is a critical issue for the wider adoption of this technology. This paper evaluates the use of a frequency-domain deconvolution of an electro-acoustic emission as a means to monitor and control the plasma formed using an atmospheric pressure plasma jet (APPJ) system. The air plasma system investigated was formed using a PlasmaTreatâ„¢ OpenAir applicator. Change in the electro-acoustic signal with changes in substrate type (ceramic, steel, polymer). APPJ nozzle to substrate distance and substrate feature size were monitored. The decoding of the electro-acoustic emission yields three sub dataset that are described three separate emission mechanisms. The three emissions are associated with: the power supply fundamental drive frequency and its harmonics; the APPJ nozzle longitudinal mode acoustic emission and its odd overtones, and the acoustic surface reflection that is produced by the impedance mismatch between the discharge and the surface. Incorporating this knowledge into a LabVIEW a program facilitated the continuous deconvolution of the electro-acoustic data. This enabled the use of specific frequency band test limits to control the process the APPJ treatment process which is sensitive to both plasma processing conditions and substrate type and features. PAC Codes: 52.40.Hf, 52.70.-m, 52.77.Fv, 43.60.Vx
Funding Details: Science Foundation Ireland
Type of material: Journal Article
Publisher: IOP Publishing
Copyright (published version): 2011 IOP Publishing
Keywords: Atmospheric plasmaElectrical harmonicsAcoustic overtonesSurface locationFault detection
DOI: 10.1088/0963-0252/20/3/035024
Language: en
Status of Item: Peer reviewed
Appears in Collections:Mechanical & Materials Engineering Research Collection

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This item is available under the Attribution-NonCommercial-NoDerivs 3.0 Ireland. No item may be reproduced for commercial purposes. For other possible restrictions on use please refer to the publisher's URL where this is made available, or to notes contained in the item itself. Other terms may apply.