Spatial variation of ferroelectric properties in Pb(Zr-0.3, Ti-0.7)O-3 thin films studied by atomic force microscopy

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Title: Spatial variation of ferroelectric properties in Pb(Zr-0.3, Ti-0.7)O-3 thin films studied by atomic force microscopy
Authors: Christman, James A.
Kim, Seung-Hyun
Maiwa, Hiroshi
Rodriguez, Brian J.
et al.
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Date: Jun-2000
Online since: 2014-01-30T10:15:16Z
Abstract: Imaging of the phase and magnitude of the piezoelectric strain in Pb(Zr-0.3, Ti-0.7)O-3 (PZT) capacitors is performed with an atomic force microscope. The imaging reveals a significant spatial dependence of the ferroelectric properties of both fatigued and unfatigued PZT films. We propose that the variation is related to the domain structure of the PZT. Through the measurement of local piezoelectric hysteresis loops and imaging of the piezoelectric strain, areas are observed in fatigued PZT that exhibit hysteresis loops shifted along the polarization axis. In some regions of fatigued samples, the hysteresis loops are shifted such that both remanent points of the hysteresis curve have the same polarization direction. These results have important implications for the scalability of nonvolatile ferroelectric random access memory to higher device densities. (C) 2000 American Institute of Physics. [S0021-8979(00)09811-X].
Type of material: Journal Article
Publisher: American Institute of Physics
Journal: Journal of Applied Physics
Volume: 87
Issue: 11
Start page: 8031
End page: 8034
Copyright (published version): 2000 American Institute of Physics
Keywords: Ferroelectric properties
DOI: 10.1063/1.373492
Language: en
Status of Item: Peer reviewed
Appears in Collections:Physics Research Collection

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