Mechanical stress effect on imprint behavior of integrated ferroelectric capacitors

Files in This Item:
File Description SizeFormat 
Gruverman_et_al_Appl_Phys_Lett_2003_Mechanical_Stress.pdf341.33 kBAdobe PDFDownload
Title: Mechanical stress effect on imprint behavior of integrated ferroelectric capacitors
Authors: Gruverman, A.
Rodriguez, Brian J.
Kingon, A. I.
et al.
Permanent link: http://hdl.handle.net/10197/5371
Date: Jul-2003
Abstract: Stress-induced changes in the imprint and switching behavior of (111)-oriented Pb(Zr,Ti)O-3 (PZT)-based capacitors have been studied using piezoresponse force microscopy. Visualization of polarization distribution and d(33)-loop measurements in individual 1x1.5-mum(2) capacitors before and after stress application, generated by substrate bending, provided direct experimental evidence of stress-induced switching. Mechanical stress caused elastic switching in capacitors with the direction of the resulting polarization determined by the sign of the applied stress. In addition, stress application turned capacitors into a heavily imprinted state characterized by strongly shifted hysteresis loops and almost complete backswitching after application of the poling voltage. It is suggested that substrate bending generated a strain gradient in the PZT layer, which produced asymmetric lattice distortion with preferential polarization direction and triggered polarization switching due to the flexoelectric effect.
Type of material: Journal Article
Publisher: American Institute of Physics
Copyright (published version): 2003 American Institute of Physics
Keywords: Piezoresponse force microscopy;Stress-induced switching;Flexoelectric effect
DOI: 10.1063/1.1593830
Language: en
Status of Item: Peer reviewed
Appears in Collections:Physics Research Collection

Show full item record

SCOPUSTM   
Citations 1

163
Last Week
0
Last month
checked on Jun 23, 2018

Page view(s) 50

60
checked on May 25, 2018

Download(s) 50

183
checked on May 25, 2018

Google ScholarTM

Check

Altmetric


This item is available under the Attribution-NonCommercial-NoDerivs 3.0 Ireland. No item may be reproduced for commercial purposes. For other possible restrictions on use please refer to the publisher's URL where this is made available, or to notes contained in the item itself. Other terms may apply.