Modelling of a charge control method for capacitive MEMS

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Title: Modelling of a charge control method for capacitive MEMS
Authors: Giounanlis, Panagiotis
Blokhina, Elena
Feely, Orla
Dominguez, Manuel
Pons Nin, Joan
Gorreta, Sergi
Permanent link: http://hdl.handle.net/10197/5429
Date: Sep-2013
Abstract: Charging of dielectric materials in microelectromechanical systems (MEMS) actuated electrostatically is a major reliability issue. In our previous work we proposed a feedback loop control method that is implemented as a circuit and that allows smart actuation for switches and varactors. In this paper we discuss system-level modeling of MEMS devices including all aspects of the system: proposed control method, charging dynamics and realistic models of the mechanical components of MEMS.
Funding Details: Science Foundation Ireland
Type of material: Conference Publication
Publisher: IEEE
Copyright (published version): © 2014 IEEE
Keywords: Capacitive MEMS;Dielectric charging;MEMS modelling
DOI: 10.1109/ECCTD.2013.6662324
Language: en
Status of Item: Peer reviewed
Is part of: 2013 European Conference on Circuit Theory and Design (ECCTD) [proceedings]
Conference Details: European Conference on Circuit Theory and Design, 8-12 September 2013, Dresden, Germany
Appears in Collections:Electrical and Electronic Engineering Research Collection

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