Charging of dielectric materials in microelectromechanical
systems (MEMS) actuated electrostatically is a major
reliability issue. In our previous work we proposed a feedback
loop control method that is implemented as a circuit and that
allows smart actuation for switches and varactors. In this paper
we discuss system-level modeling of MEMS devices including
all aspects of the system: proposed control method, charging
dynamics and realistic models of the mechanical components of
MEMS.