Sigma Delta Effects and Charge Locking in Capacitive MEMS under Dielectric Charge Control

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Title: Sigma Delta Effects and Charge Locking in Capacitive MEMS under Dielectric Charge Control
Authors: Giounanlis, Panagiotis
Gorreta, Sergi
Dominguez, Manuel
Pons Nin, Joan
Feely, Orla
Blokhina, Elena
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Date: Feb-2016
Abstract: This work investigates, analytically and experimentally, the effects induced by the use of a first-order sigma-delta feedback loop as a control method of dielectric charging for capacitive MEMS. This technique allows one to set a desired level of net charge in the dielectric of a MEMS device by continuously alternating the polarity of the actuation voltage. This control system displays a number of interesting effects, inherited from sigma-delta modulation, and not usually found in conventional MEMS applications, with the charge locking phenomenon being the most relevant. The convergence time and the effectiveness of the control method are also investigated and discussed.
Type of material: Journal Article
Publisher: IEEE
Copyright (published version): 2017 IEEE
Keywords: DielectricsMicromechanical devicesCharge carrier processesMathematical modelCapacitanceDischarges (electric)Electrodes
DOI: 10.1109/TCSII.2016.2563858
Language: en
Status of Item: Peer reviewed
Appears in Collections:Electrical and Electronic Engineering Research Collection

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