Sigma Delta Effects and Charge Locking in Capacitive MEMS under Dielectric Charge Control
|Title:||Sigma Delta Effects and Charge Locking in Capacitive MEMS under Dielectric Charge Control||Authors:||Giounanlis, Panagiotis
Pons Nin, Joan
|Permanent link:||http://hdl.handle.net/10197/9089||Date:||Feb-2016||Abstract:||This work investigates, analytically and experimentally, the effects induced by the use of a first-order sigma-delta feedback loop as a control method of dielectric charging for capacitive MEMS. This technique allows one to set a desired level of net charge in the dielectric of a MEMS device by continuously alternating the polarity of the actuation voltage. This control system displays a number of interesting effects, inherited from sigma-delta modulation, and not usually found in conventional MEMS applications, with the charge locking phenomenon being the most relevant. The convergence time and the effectiveness of the control method are also investigated and discussed.||Type of material:||Journal Article||Publisher:||IEEE||Copyright (published version):||2017 IEEE||Keywords:||Dielectrics; Micromechanical devices; Charge carrier processes; Mathematical model; Capacitance; Discharges (electric); Electrodes||DOI:||10.1109/TCSII.2016.2563858||Language:||en||Status of Item:||Peer reviewed|
|Appears in Collections:||Electrical and Electronic Engineering Research Collection|
Show full item record
This item is available under the Attribution-NonCommercial-NoDerivs 3.0 Ireland. No item may be reproduced for commercial purposes. For other possible restrictions on use please refer to the publisher's URL where this is made available, or to notes contained in the item itself. Other terms may apply.