Sigma Delta Effects and Charge Locking in Capacitive MEMS under Dielectric Charge Control

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Title: Sigma Delta Effects and Charge Locking in Capacitive MEMS under Dielectric Charge Control
Authors: Giounanlis, PanagiotisGorreta, SergiDominguez, ManuelPons Nin, JoanFeely, OrlaBlokhina, Elena
Permanent link: http://hdl.handle.net/10197/9089
Date: Feb-2016
Online since: 2017-12-12T12:44:10Z
Abstract: This work investigates, analytically and experimentally, the effects induced by the use of a first-order sigma-delta feedback loop as a control method of dielectric charging for capacitive MEMS. This technique allows one to set a desired level of net charge in the dielectric of a MEMS device by continuously alternating the polarity of the actuation voltage. This control system displays a number of interesting effects, inherited from sigma-delta modulation, and not usually found in conventional MEMS applications, with the charge locking phenomenon being the most relevant. The convergence time and the effectiveness of the control method are also investigated and discussed.
Type of material: Journal Article
Publisher: IEEE
Journal: IEEE Transactions on Circuits and Systems II: Express Briefs
Volume: 64
Issue: 2
Start page: 206
End page: 210
Copyright (published version): 2017 IEEE
Keywords: DielectricsMicromechanical devicesCharge carrier processesMathematical modelCapacitanceDischarges (electric)Electrodes
DOI: 10.1109/TCSII.2016.2563858
Language: en
Status of Item: Peer reviewed
This item is made available under a Creative Commons License: https://creativecommons.org/licenses/by-nc-nd/3.0/ie/
Appears in Collections:Electrical and Electronic Engineering Research Collection

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