Sigma Delta Effects and Charge Locking in Capacitive MEMS under Dielectric Charge Control
|Title:||Sigma Delta Effects and Charge Locking in Capacitive MEMS under Dielectric Charge Control||Authors:||Giounanlis, Panagiotis; Gorreta, Sergi; Dominguez, Manuel; Pons Nin, Joan; Feely, Orla; Blokhina, Elena||Permanent link:||http://hdl.handle.net/10197/9089||Date:||Feb-2016||Online since:||2017-12-12T12:44:10Z||Abstract:||This work investigates, analytically and experimentally, the effects induced by the use of a first-order sigma-delta feedback loop as a control method of dielectric charging for capacitive MEMS. This technique allows one to set a desired level of net charge in the dielectric of a MEMS device by continuously alternating the polarity of the actuation voltage. This control system displays a number of interesting effects, inherited from sigma-delta modulation, and not usually found in conventional MEMS applications, with the charge locking phenomenon being the most relevant. The convergence time and the effectiveness of the control method are also investigated and discussed.||Type of material:||Journal Article||Publisher:||IEEE||Journal:||IEEE Transactions on Circuits and Systems II: Express Briefs||Volume:||64||Issue:||2||Start page:||206||End page:||210||Copyright (published version):||2017 IEEE||Keywords:||Dielectrics; Micromechanical devices; Charge carrier processes; Mathematical model; Capacitance; Discharges (electric); Electrodes||DOI:||10.1109/TCSII.2016.2563858||Language:||en||Status of Item:||Peer reviewed||This item is made available under a Creative Commons License:||https://creativecommons.org/licenses/by-nc-nd/3.0/ie/|
|Appears in Collections:||Electrical and Electronic Engineering Research Collection|
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