Deng, Xiong

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Deng, Xiong
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Deng, Xiong

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  • Publication
    Investigation of AFM-based machining of ferroelectric thin films at the nanoscale
    (American Institute of Physics, 2020-01-17)
    Zhang, Fengyuan 
    ;
    Edwards, David 
    ;
    Deng, Xiong 
    ;
    Kilpatrick, J. I. 
    ;
    Rodriguez, Brian J. 
    ;
    et al. 
    Atomic force microscopy (AFM) has been utilized for nanomechanical machining of various materials including polymers, metals, and semiconductors. Despite being important candidate materials for a wide range of applications including data storage and actuators, ferroelectric materials have rarely been machined via AFM. AFM-based machining of ferroelectric nanostructures offers advantages over established techniques, such as bottom-up approaches and focused ion beam milling, in select cases where low damage and low-cost modification of already-fabricated thin films are required. Through a systematic investigation of a broad range of AFM parameters, we demonstrate that AFM-based machining provides a low-cost option to rapidly modify local regions of the film, as well as fabricate a range of different nanostructures, including a nanocapacitor array with individually addressable ferroelectric elements.
      120Scopus© Citations 12