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Yatagai, Toyohiko
Preferred name
Yatagai, Toyohiko
Official Name
Yatagai, Toyohiko
Research Output
Now showing 1 - 2 of 2
- PublicationSpectral and temporal behavior of an alkali metal plasma extreme ultraviolet source for surface morphology applications(American Institute of Physics, 2011-02-28)
; ; ; ; ; ; ; ; We have characterized the emission spectrum and temporal history of a pure potassium plasma in a capillary discharge. Strong broadband emission was observed around 40 nm due to 3s−3p, 3p−3d, and 3d−4f transitions in ions ranging from K2+ to K4+ at a time-integrated electron temperature of about 12 eV. The temporal behavior of this emission strongly follows the recombination phase in the plasma and it was successfully reproduced by a hydrodynamic simulation of the potassium plasma which accounted for atomic processes.388Scopus© Citations 3 - PublicationSystematic investigation of self-absorption property and conversion efficiency of 6.7-nm extreme ultraviolet sources(American Institute of Physics, 2010-12)
; ; ; ; ; ; ; ; ; We have demonstrated rare-earth plasma extreme ultraviolet sources at 6.7 nm to investigate the spectral behavior and the conversion efficiencies to different laser wavelength and the initial target densities. The conversion efficiency was maximized to be 0.9% at laser intensity of 7 × 1012 W/cm2 at its wavelength of 1064 nm, which is attributed to the minimum self-absorption effect by use of the low initial density target, together with the narrow spectrum. It is important to use a low initial density target and to produce low electron density plasmas for efficient EUV sources using the high-Z targets.413Scopus© Citations 51