Giounanlis, PanagiotisPanagiotisGiounanlisGorreta, SergiSergiGorretaDominguez, ManuelManuelDominguezPons Nin, JoanJoanPons NinFeely, OrlaOrlaFeelyBlokhina, ElenaElenaBlokhina2017-12-122017-12-122017 IEEE2016-02IEEE Transactions on Circuits and Systems II: Express Briefshttp://hdl.handle.net/10197/9089This work investigates, analytically and experimentally, the effects induced by the use of a first-order sigma-delta feedback loop as a control method of dielectric charging for capacitive MEMS. This technique allows one to set a desired level of net charge in the dielectric of a MEMS device by continuously alternating the polarity of the actuation voltage. This control system displays a number of interesting effects, inherited from sigma-delta modulation, and not usually found in conventional MEMS applications, with the charge locking phenomenon being the most relevant. The convergence time and the effectiveness of the control method are also investigated and discussed.en© 2017 IEEE. Personal use of this material is permitted. Permission from IEEE must be obtained for all other uses, in any current or future media, including reprinting/republishing this material for advertising or promotional purposes, creating new collective works, for resale or redistribution to servers or lists, or reuse of any copyrighted component of this work in other worksDielectricsMicromechanical devicesCharge carrier processesMathematical modelCapacitanceDischarges (electric)ElectrodesJournal Article64220621010.1109/TCSII.2016.25638582017-06-28https://creativecommons.org/licenses/by-nc-nd/3.0/ie/